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Homepage>BS Standards>71 CHEMICAL TECHNOLOGY>71.040 Analytical chemistry>71.040.40 Chemical analysis>15/30291643 DC BS ISO 18516. Surface chemical analysis. Determination of lateral resolution and sharpness in beam based methods
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immediate downloadReleased: 2015-03-03
15/30291643 DC BS ISO 18516. Surface chemical analysis. Determination of lateral resolution and sharpness in beam based methods

15/30291643 DC

BS ISO 18516. Surface chemical analysis. Determination of lateral resolution and sharpness in beam based methods

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Standard number:15/30291643 DC
Pages:58
Released:2015-03-03
Status:Draft for Comment
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15/30291643 DC


This standard 15/30291643 DC BS ISO 18516. Surface chemical analysis. Determination of lateral resolution and sharpness in beam based methods is classified in these ICS categories:
  • 71.040.40 Chemical analysis