BS ISO 18115-3. Surface chemical analysis. Vocabulary Part 3. Terms used in optical interface analysis
|Standard number:||21/30385921 DC|
|Status:||Draft for Comment|
This standard 21/30385921 DC BS ISO 18115-3. Surface chemical analysis. Vocabulary is classified in these ICS categories:
- 01.040.71 Chemical technology (Vocabularies)
- 71.040.40 Chemical analysis
This International Standard defines terms for surface chemical analysis in the area of optical interface analysis including ellipsometry, Raman spectroscopy and nonlinear optical techniques as well as general optical terms. ISO 18115-1 covers general surface chemical analysis terms and those used in spectroscopy while ISO 18115-2 covers terms used in scanning-probe microscopy.