PRICES include / exclude VAT
Sponsored link
Not available online - contact us!
CURRENCY
Standard´s number: | ISO 14606:2015 |
Pages: | 16 |
Edition: | 2 |
Released: | 2015 |
Language: | English |
DESCRIPTION
ISO 14606:2015
ISO 14606:2015 gives guidance on the optimization of sputter-depth profiling parameters using appropriate single-layered and multilayered reference materials in order to achieve optimum depth resolution as a function of instrument settings in Auger electron spectroscopy, X-ray photoelectron spectroscopy and secondary ion mass spectrometry. ISO 14606:2015 is not intended to cover the use of special multilayered systems such as delta doped layers.