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download between 0-24 hoursReleased: 2022
ISO/TS 22933:2022
ISO/TS 22933:2022-Surface chemical analysis-Secondary ion mass spectrometry
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| Standard´s number: | ISO/TS 22933:2022 |
| Pages: | 15 |
| Edition: | 1 |
| Released: | 2022 |
| Language: | English |
DESCRIPTION
ISO/TS 22933:2022
This document specifies a method for measuring the mass resolution in SIMS, and how to compare the mass resolution between different instruments (e.g. TOF-SIMS, Magnetic SIMS, Quadrupole SIMS, Fourier Transform SIMS, etc.) by considering the peak shapes.