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Homepage>ISO Standards>ISO/TS 25138:2019-Surface chemical analysis-Analysis of metal oxide films by glow-discharge optical-emission spectrometry
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ISO/TS 25138:2019-Surface chemical analysis-Analysis of metal oxide films by glow-discharge optical-emission spectrometry

ISO/TS 25138:2019

ISO/TS 25138:2019-Surface chemical analysis-Analysis of metal oxide films by glow-discharge optical-emission spectrometry

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Standard´s number:ISO/TS 25138:2019
Pages:40
Edition:2
Released:2019
Language:English
DESCRIPTION

ISO/TS 25138:2019


This document describes a glow-discharge optical-emission spectrometric method for the determination of the thickness, mass per unit area and chemical composition of metal oxide films. This method is applicable to oxide films 1 nm to 10 000 nm thick on metals. The metallic elements of the oxide can include one or more from Fe, Cr, Ni, Cu, Ti, Si, Mo, Zn, Mg, Mn, Zr and Al. Other elements that can be determined by the method are O, C, N, H, P and S.