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Homepage>BS Standards>13 ENVIRONMENT. HEALTH PROTECTION. SAFETY>13.040 Air quality>13.040.35 Cleanrooms and associated controlled environments>BS EN ISO 14644-10:2022 Cleanrooms and associated controlled environments Assessment of surface cleanliness for chemical contamination
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immediate downloadReleased: 2022-07-13
BS EN ISO 14644-10:2022 Cleanrooms and associated controlled environments Assessment of surface cleanliness for chemical contamination

BS EN ISO 14644-10:2022

Cleanrooms and associated controlled environments Assessment of surface cleanliness for chemical contamination

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Standard number:BS EN ISO 14644-10:2022
Pages:42
Released:2022-07-13
ISBN:978 0 539 16126 7
Status:Standard
DESCRIPTION

BS EN ISO 14644-10:2022


This standard BS EN ISO 14644-10:2022 Cleanrooms and associated controlled environments is classified in these ICS categories:
  • 13.040.35 Cleanrooms and associated controlled environments
This document establishes appropriate testing processes to determine the cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and particles). This document is applicable to all solid surfaces in cleanrooms and associated controlled environments such as walls, ceilings, floors, worksurfaces, tools, equipment and devices. NOTE 1    For the purpose of this document, consideration is only given to the chemical characteristics of a particle. The physical properties of the particle are not considered and this document does not cover the interaction between the contamination and the surface. NOTE 2    This document does not include the contamination generation process or any time-dependent influences (e.g. deposition, sedimentation, ageing) or process-dependent activities such as transportation and handling. Neither does it include guidance on statistical quality-control techniques to ensure compliance.
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