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Homepage>BS Standards>19 TESTING>19.100 Non-destructive testing>BS ISO 15632:2021 Microbeam analysis. Selected instrumental performance parameters for the specification and checking of energy-dispersive X-ray spectrometers (EDS) for use with a scanning electron microscope (SEM) or an electron probe microanalyser (EPMA)
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immediate downloadReleased: 2021-02-22
BS ISO 15632:2021 Microbeam analysis. Selected instrumental performance parameters for the specification and checking of energy-dispersive X-ray spectrometers (EDS) for use with a scanning electron microscope (SEM) or an electron probe microanalyser (EPMA)

BS ISO 15632:2021

Microbeam analysis. Selected instrumental performance parameters for the specification and checking of energy-dispersive X-ray spectrometers (EDS) for use with a scanning electron microscope (SEM) or an electron probe microanalyser (EPMA)

CURRENCY
LANGUAGE
English
Standard number:BS ISO 15632:2021
Pages:22
Released:2021-02-22
ISBN:978 0 539 04693 9
Status:Standard
DESCRIPTION
This standard BS ISO 15632:2021 Microbeam analysis. Selected instrumental performance parameters for the specification and checking of energy-dispersive X-ray spectrometers (EDS) for use with a scanning electron microscope (SEM) or an electron probe microanalyser (EPMA) is classified in these ICS categories:
  • 71.040.99 Other standards related to analytical chemistry
  • 19.100 Non-destructive testing

This document defines the most important quantities that characterize an energy-dispersive X?ray spectrometer consisting of a semiconductor detector, a pre-amplifier and a signal-processing unit as the essential parts. This document is only applicable to spectrometers with semiconductor detectors operating on the principle of solid-state ionization. This document specifies minimum requirements and how relevant instrumental performance parameters are to be checked for such spectrometers attached to a scanning electron microscope (SEM) or an electron probe microanalyser (EPMA). The procedure used for the actual analysis is outlined in ISO 22309[ 2] and ASTM E1508[ 3] and is outside the scope of this document.


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