BS ISO 15632:2021
Microbeam analysis. Selected instrumental performance parameters for the specification and checking of energy-dispersive X-ray spectrometers (EDS) for use with a scanning electron microscope (SEM) or an electron probe microanalyser (EPMA)
|Standard number:||BS ISO 15632:2021|
|ISBN:||978 0 539 04693 9|
- 71.040.99 Other standards related to analytical chemistry
- 19.100 Non-destructive testing
This document defines the most important quantities that characterize an energy-dispersive X?ray spectrometer consisting of a semiconductor detector, a pre-amplifier and a signal-processing unit as the essential parts. This document is only applicable to spectrometers with semiconductor detectors operating on the principle of solid-state ionization. This document specifies minimum requirements and how relevant instrumental performance parameters are to be checked for such spectrometers attached to a scanning electron microscope (SEM) or an electron probe microanalyser (EPMA). The procedure used for the actual analysis is outlined in ISO 22309[ 2] and ASTM E1508[ 3] and is outside the scope of this document.