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>ISO Standards>ISO 16700:2016-Microbeam analysis — Scanning electron microscopy — Guidelines for calibrating image magnification
immediate downloadReleased: 2016
ISO 16700:2016-Microbeam analysis — Scanning electron microscopy — Guidelines for calibrating image magnification

ISO 16700:2016

ISO 16700:2016-Microbeam analysis — Scanning electron microscopy — Guidelines for calibrating image magnification

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Standard´s number:ISO 16700:2016
Pages:18
Edition:2
Released:2016
Language:English
DESCRIPTION

ISO 16700:2016


ISO 16700:2016 specifies a method for calibrating the magnification of images generated by a scanning electron microscope (SEM) using an appropriate reference material. This method is limited to magnifications determined by the available size range of structures in the calibrating reference material. It does not apply to the dedicated critical dimension measurement SEM.
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