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>BSI Standards >31 ELECTRONICS>31.080 Semiconductor devices>31.080.99 Other semiconductor devices>24/30497113 DC BS EN IEC 63567-1 Semiconductor devices. Performance evaluation of semiconductor processing components and inspection equipment Part 1. Transmittance evaluation method of EUV pellicle
immediate downloadReleased: 2024-07-12
24/30497113 DC BS EN IEC 63567-1 Semiconductor devices. Performance evaluation of semiconductor processing components and inspection equipment Part 1. Transmittance evaluation method of EUV pellicle

24/30497113 DC

BS EN IEC 63567-1 Semiconductor devices. Performance evaluation of semiconductor processing components and inspection equipment Part 1. Transmittance evaluation method of EUV pellicle

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Standard number:24/30497113 DC
Pages:16
Released:2024-07-12
Status:Draft for Comment
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24/30497113 DC


This standard 24/30497113 DC BS EN IEC 63567-1 Semiconductor devices. Performance evaluation of semiconductor processing components and inspection equipment is classified in these ICS categories:
  • 31.080.99 Other semiconductor devices

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