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>BSI Standards >29 ELECTRICAL ENGINEERING>29.100 Components for electrical equipment>29.100.20 Electrical and electromechanical components>25/30510437 DC Draft BS EN 62047-55 Ed.1.0 Micro-electromechanical devices Part 55: Silicon based MEMS fabrication technology - Test method of microstructure pendulum impact
immediate downloadReleased: 2025-12-12
25/30510437 DC Draft BS EN 62047-55 Ed.1.0 Micro-electromechanical devices Part 55: Silicon based MEMS fabrication technology - Test method of microstructure pendulum impact

25/30510437 DC

Draft BS EN 62047-55 Ed.1.0 Micro-electromechanical devices Part 55: Silicon based MEMS fabrication technology - Test method of microstructure pendulum impact

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Standard number:25/30510437 DC
Pages:18
Released:2025-12-12
Status:Draft for Comment
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25/30510437 DC


This standard 25/30510437 DC Draft BS EN 62047-55 Ed.1.0 Micro-electromechanical devices is classified in these ICS categories:
  • 29.100.20 Electric and electromechanical components

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