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>BSI Standards >31 ELECTRONICS>31.080 Semiconductor devices>31.080.99 Other semiconductor devices>BS IEC 62047-34:2019 Semiconductor devices. Micro-electromechanical devices Test methods for MEMS piezoresistive pressure-sensitive device on wafer
immediate downloadReleased: 2019-04-16
BS IEC 62047-34:2019 Semiconductor devices. Micro-electromechanical devices Test methods for MEMS piezoresistive pressure-sensitive device on wafer

BS IEC 62047-34:2019

Semiconductor devices. Micro-electromechanical devices Test methods for MEMS piezoresistive pressure-sensitive device on wafer

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Standard number:BS IEC 62047-34:2019
Pages:20
Released:2019-04-16
ISBN:978 0 580 97391 8
Status:Standard
DESCRIPTION

BS IEC 62047-34:2019


This standard BS IEC 62047-34:2019 Semiconductor devices. Micro-electromechanical devices is classified in these ICS categories:
  • 31.140 Piezoelectric devices
  • 31.080.99 Other semiconductor devices
IEC 62047-34:2019 (E) describes test conditions and test methods of electric character, static performances and thermal performances for MEMS pressure-sensitive devices. This document applies to test for both open and closed loop piezoresistive MEMS pressure devices on wafer.
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