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Homepage>CSN Standards>01 GENERAL CLASS>0144 Tolerances of shape and position, geometry of surface>CSN EN ISO 25178-603 - Geometrical product specifications (GPS) - Surface texture: Areal - Part 603: Design and characteristics of non-contact (phase shifting interferometry) instruments
Released: 01.08.2025
CSN EN ISO 25178-603 - Geometrical product specifications (GPS) - Surface texture: Areal - Part 603: Design and characteristics of non-contact (phase shifting interferometry) instruments

CSN EN ISO 25178-603

Geometrical product specifications (GPS) - Surface texture: Areal - Part 603: Design and characteristics of non-contact (phase shifting interferometry) instruments

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Number of Standard:CSN EN ISO 25178-603
Category:014451
Pages:32
Released:01.08.2025
Catalog number:521667
DESCRIPTION

CSN EN ISO 25178-603

CSN EN ISO 25178-603 This document specifies the design and metrological characteristics of phase shifting interferometry (PSI) instruments for the areal measurement of surface topography. Because surface profiles can be extracted from areal surface topography data, the methods described in this document are also applicable to profiling measurements.
Original English text of CSN EN Standard.
The price of the Standard included all amendments and correcturs.