Geometrical product specifications (GPS) - Surface texture: Areal - Part 603: Design and characteristics of non-contact (phase shifting interferometry) instruments
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English Hardcopy
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Number of Standard:
CSN EN ISO 25178-603
Category:
014451
Pages:
32
Released:
01.08.2025
Catalog number:
521667
DESCRIPTION
CSN EN ISO 25178-603
CSN EN ISO 25178-603 This document specifies the design and metrological characteristics of phase shifting interferometry (PSI) instruments for the areal measurement of surface topography. Because surface profiles can be extracted from areal surface topography data, the methods described in this document are also applicable to profiling measurements. Original English text of CSN EN Standard. The price of the Standard included all amendments and correcturs.