Geometrical product specifications (GPS) - Surface texture: Areal - Part 604: Design and characteristics of non-contact (coherence scanning interferometry) instruments
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English Hardcopy
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Number of Standard:
CSN EN ISO 25178-604
Category:
014451
Pages:
36
Released:
01.08.2025
Catalog number:
521668
DESCRIPTION
CSN EN ISO 25178-604
CSN EN ISO 25178-604 This document specifies the design and metrological characteristics of coherence scanning interferometry (CSI) instruments for the areal measurement of surface topography. Because surface profiles can be extracted from surface topography data, the methods described in this document are also applicable to profiling measurements. Original English text of CSN EN Standard. The price of the Standard included all amendments and correcturs.