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IEC 62047-10:2011/COR1:2012
Corrigendum 1 - Semiconductor devices - Micro-electromechanical devices - Part 10: Micro-pillar compression test for MEMS materials
Corrigendum 1 - Dispositifs à semiconducteurs - Dispositifs microélectromécaniques - Partie 10: Essai de compression utilisant la technique des micro-piliers pour les matériaux des MEMS
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| Standard number: | IEC 62047-10:2011/COR1:2012 |
| Released: | 2012-02-28 |
| Edition: | 1 |
| ICS: | 31.080.99 |
| Pages (English/French - Bilingual): | 0 |
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