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IEC 62374-1:2010
Semiconductor devices - Part 1: Time-dependent dielectric breakdown (TDDB) test for inter-metal layers
Dispositifs à semiconducteurs - Partie 1: Essai de rupture diélectrique en fonction du temps (TDDB) pour les couches intermétalliques
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Standard number: | IEC 62374-1:2010 |
Released: | 2010-09-29 |
Edition: | 1 |
ICS: | 31.080.99 |
Pages (English/French - Bilingual): | 32 |
ISBN (English/French - Bilingual): | 9782889121786 |
DESCRIPTION
IEC 62374-1:2010
IEC 62374-1:2010 describes a test method, test structure and lifetime estimation method of the time-dependent dielectric breakdown (TDDB) test for inter-metal layers applied in semiconductor devices.