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>ISO Standards>ISO 21466:2019-Microbeam analysis — Scanning electron microscopy — Method for evaluating critical dimensions by CD-SEM
immediate downloadReleased: 2019
ISO 21466:2019-Microbeam analysis — Scanning electron microscopy — Method for evaluating critical dimensions by CD-SEM

ISO 21466:2019

ISO 21466:2019-Microbeam analysis — Scanning electron microscopy — Method for evaluating critical dimensions by CD-SEM

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Standard´s number:ISO 21466:2019
Pages:47
Edition:1
Released:2019
Language:English
DESCRIPTION

ISO 21466:2019


This document specifies the structure model with related parameters, file format and fitting procedure for characterizing critical dimension (CD) values for wafer and photomask by imaging with a critical dimension scanning electron microscope (CD-SEM) by the model-based library (MBL) method. The method is applicable to linewidth determination for specimen, such as, gate on wafer, photomask, single isolated or dense line feature pattern down to size of 10 nm.
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