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>ISO Standards>ISO/TS 22933:2022-Surface chemical analysis — Secondary ion mass spectrometry — Method for the measurement of mass resolution in SIMS
immediate downloadReleased: 2022
ISO/TS 22933:2022-Surface chemical analysis — Secondary ion mass spectrometry — Method for the measurement of mass resolution in SIMS

ISO/TS 22933:2022

ISO/TS 22933:2022-Surface chemical analysis — Secondary ion mass spectrometry — Method for the measurement of mass resolution in SIMS

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Standard´s number:ISO/TS 22933:2022
Pages:15
Edition:1
Released:2022
Language:English
DESCRIPTION

ISO/TS 22933:2022


This document specifies a method for measuring the mass resolution in SIMS, and how to compare the mass resolution between different instruments (e.g. TOF-SIMS, Magnetic SIMS, Quadrupole SIMS, Fourier Transform SIMS, etc.) by considering the peak shapes.
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