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>BSI Standards >31 ELECTRONICS>31.080 Semiconductor devices>31.080.01 Semiconductor devices in general>18/30383935 DC BS EN IEC 62047-37. Semiconductor devices. Micro-electromechanical devices Part 37. Environmental test methods of MEMS piezoelectric thin films for sensor application
immediate downloadReleased: 2018-12-04
18/30383935 DC BS EN IEC 62047-37. Semiconductor devices. Micro-electromechanical devices Part 37. Environmental test methods of MEMS piezoelectric thin films for sensor application

18/30383935 DC

BS EN IEC 62047-37. Semiconductor devices. Micro-electromechanical devices Part 37. Environmental test methods of MEMS piezoelectric thin films for sensor application

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Standard number:18/30383935 DC
Pages:19
Released:2018-12-04
Status:Draft for Comment
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18/30383935 DC


This standard 18/30383935 DC BS EN IEC 62047-37. Semiconductor devices. Micro-electromechanical devices is classified in these ICS categories:
  • 31.080.01 Semiconductor devices in general
  • 31.080.99 Other semiconductor devices
  • 31.140 Piezoelectric devices

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