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immediate downloadReleased: 2023-04-19
23/30454370 DC
BS EN IEC 62047-46. Semiconductor devices. Micro-electromechanical devices Part 46. Silicon based MEMS fabrication technology. Measurement method of tensile strength of nanoscale membrane
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Standard number: | 23/30454370 DC |
Pages: | 15 |
Released: | 2023-04-19 |
Status: | Draft for Comment |
DESCRIPTION
23/30454370 DC
This standard 23/30454370 DC BS EN IEC 62047-46. Semiconductor devices. Micro-electromechanical devices is classified in these ICS categories:
- 31.080.99 Other semiconductor devices