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>BSI Standards >31 ELECTRONICS>31.080 Semiconductor devices>31.080.01 Semiconductor devices in general>25/30510635 DC Draft BS EN 63567-3 Semiconductor devices - Performance evaluation of semiconductor processing components and inspection equipment Part 3: Nano-scale wafer surface inspection method using UV light
immediate downloadReleased: 2025-08-26
25/30510635 DC Draft BS EN 63567-3 Semiconductor devices - Performance evaluation of semiconductor processing components and inspection equipment Part 3: Nano-scale wafer surface inspection method using UV light

25/30510635 DC

Draft BS EN 63567-3 Semiconductor devices - Performance evaluation of semiconductor processing components and inspection equipment Part 3: Nano-scale wafer surface inspection method using UV light

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Standard number:25/30510635 DC
Pages:25
Released:2025-08-26
Status:Draft for Comment
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25/30510635 DC


This standard 25/30510635 DC Draft BS EN 63567-3 Semiconductor devices - Performance evaluation of semiconductor processing components and inspection equipment is classified in these ICS categories:
  • 31.080.01 Semiconductor devices in general

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