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>BSI Standards >31 ELECTRONICS>31.080 Semiconductor devices>31.080.01 Semiconductor devices in general>26/30510433 DC Draft BS EN 62047-54 Ed.1.0 Micro-electromechanical devices Part 54: Silicon based MEMS fabrication technology - Test method of microstructure tensile
immediate downloadReleased: 2026-01-09

26/30510433 DC

Draft BS EN 62047-54 Ed.1.0 Micro-electromechanical devices Part 54: Silicon based MEMS fabrication technology - Test method of microstructure tensile

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Standard number:26/30510433 DC
Pages:18
Released:2026-01-09
Status:Draft for Comment
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26/30510433 DC


This standard 26/30510433 DC Draft BS EN 62047-54 Ed.1.0 Micro-electromechanical devices is classified in these ICS categories:
  • 31.080.01 Semiconductor devices in general

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