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Main page>ASTM Standards>ASTM E0766-14R19 - Standard Practice for Calibrating the Magnification of a Scanning Electron Microscope
Released: 01.11.2019
ASTM E0766-14R19
Standard Practice for Calibrating the Magnification of a Scanning Electron Microscope
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Standard number:
ASTM E0766-14R19
Released:
01.11.2019
Status:
Active
Pages:
6
Section:
03.01
Keywords:
calibration; magnification; pitch; scanning electron microscope; SEM;
ASTM number:
ASTM E766
Supersedes:
E0766-14E01
DESCRIPTION
1.1 This practice covers general procedures necessary for the calibration of magnification of scanning electron microscopes. The relationship between true magnification and indicated magnification is a complicated function of operating conditions.2 Therefore, this practice must be applied to each set of standard operating conditions to be used.
1.2 The values stated in SI units are to be regarded as standard. No other units of measurement are included in this standard.
1.3This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety, health, and environmental practices and determine the applicability of regulatory limitations prior to use.
1.4This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee.