BS EN 62047-1:2016

Semiconductor devices. Micro-electromechanical devices Terms and definitions

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Standard number:	BS EN 62047-1:2016
Pages:	38
Released:	2016-04-30
ISBN:	978 0 580 84971 8
Status:	Standard

DESCRIPTION

BS EN 62047-1:2016

This standard BS EN 62047-1:2016 Semiconductor devices. Micro-electromechanical devices is classified in these ICS categories:

31.080.99 Other semiconductor devices

IEC 62047-1:2016 defines terms for micro-electromechanical devices including the process of production of such devices. This edition includes the following significant technical changes with respect to the previous edition:
a) removal of ten terms;
b) revision of twelve terms;
c) addition of sixteen new terms.

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