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immediate downloadReleased: 2006-11-30
BS EN 62047-2:2006
Semiconductor devices. Micro-electromechanical devices Tensile testing method of thin film materials
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Standard number: | BS EN 62047-2:2006 |
Pages: | 16 |
Released: | 2006-11-30 |
ISBN: | 0 580 49740 2 |
Status: | Standard |
DESCRIPTION
BS EN 62047-2:2006
This standard BS EN 62047-2:2006 Semiconductor devices. Micro-electromechanical devices is classified in these ICS categories:
- 31.080.99 Other semiconductor devices