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immediate downloadReleased: 2019-01-29
BS IEC 62047-32:2019
Semiconductor devices. Micro-electromechanical devices Test method for the nonlinear vibration of MEMS resonators
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| Standard number: | BS IEC 62047-32:2019 |
| Pages: | 22 |
| Released: | 2019-01-29 |
| ISBN: | 978 0 580 97389 5 |
| Status: | Standard |
DESCRIPTION
BS IEC 62047-32:2019
This standard BS IEC 62047-32:2019 Semiconductor devices. Micro-electromechanical devices is classified in these ICS categories:
- 31.080.99 Other semiconductor devices
This part of IEC 62047 specifies the test method and test condition for the nonlinear vibration of MEMS resonators. The statements made in this document apply to the development and manufacture for MEMS resonators.