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immediate downloadReleased: 2022-10-24
BS IEC 62047-42:2022
Semiconductor devices. Micro-electromechanical devices Measurement methods of electro-mechanical conversion characteristics of piezoelectric MEMS cantilever
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| Standard number: | BS IEC 62047-42:2022 |
| Pages: | 24 |
| Released: | 2022-10-24 |
| ISBN: | 978 0 539 16581 4 |
| Status: | Standard |
DESCRIPTION
BS IEC 62047-42:2022
This standard BS IEC 62047-42:2022 Semiconductor devices. Micro-electromechanical devices is classified in these ICS categories:
- 31.080.99 Other semiconductor devices