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>BSI Standards >31 ELECTRONICS>31.080 Semiconductor devices>31.080.99 Other semiconductor devices>BS IEC 62047-52:2026 Semiconductor devices - Micro-electromechanical devices Part 52: Biaxial tensile testing method for stretchable MEMS
immediate downloadReleased: 2026-03-10
BS IEC 62047-52:2026 Semiconductor devices - Micro-electromechanical devices Part 52: Biaxial tensile testing method for stretchable MEMS

BS IEC 62047-52:2026

Semiconductor devices - Micro-electromechanical devices Part 52: Biaxial tensile testing method for stretchable MEMS

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Standard number:BS IEC 62047-52:2026
Pages:18
Released:2026-03-10
ISBN:978 0 539 33390 9
Status:Standard
DESCRIPTION

BS IEC 62047-52:2026


This standard BS IEC 62047-52:2026 Semiconductor devices - Micro-electromechanical devices is classified in these ICS categories:
  • 31.080.99 Other semiconductor devices

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