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immediate downloadReleased: 2015-08-31
BS ISO 13083:2015
Surface chemical analysis. Scanning probe microscopy. Standards on the definition and calibration of spatial resolution of electrical scanning probe microscopes (ESPMs) such as SSRM and SCM for 2D-dopant imaging and other purposes
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| Standard number: | BS ISO 13083:2015 |
| Pages: | 26 |
| Released: | 2015-08-31 |
| ISBN: | 978 0 580 67751 9 |
| Status: | Standard |
DESCRIPTION
BS ISO 13083:2015
This standard BS ISO 13083:2015 Surface chemical analysis. Scanning probe microscopy. Standards on the definition and calibration of spatial resolution of electrical scanning probe microscopes (ESPMs) such as SSRM and SCM for 2D-dopant imaging and other purposes is classified in these ICS categories:
- 71.040.40 Chemical analysis