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>BSI Standards >25 MANUFACTURING ENGINEERING>25.220 Surface treatment and coating>25.220.01 Surface treatment and coating in general>BS ISO 19383:2026 Atomic layer deposition. Chemical characteristics and related process specifications of atomic layer deposition precursors
immediate downloadReleased: 2026-06-03

BS ISO 19383:2026

Atomic layer deposition. Chemical characteristics and related process specifications of atomic layer deposition precursors

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Standard number:BS ISO 19383:2026
Pages:22
Released:2026-06-03
ISBN:978 0 539 32348 1
Status:Standard
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BS ISO 19383:2026


This standard BS ISO 19383:2026 Atomic layer deposition. Chemical characteristics and related process specifications of atomic layer deposition precursors is classified in these ICS categories:
  • 25.220.01 Surface treatment and coating in general