BS ISO 22493:2014

This standard BS ISO 22493:2014 Microbeam analysis. Scanning electron microscopy. Vocabulary is classified in these ICS categories:

• 71.040.50 Physicochemical methods of analysis
• 01.040.71 Chemical technology (Vocabularies)
• 37.020 Optical equipment
• 01.040.37 Image technology (Vocabularies)

This International Standard defines terms used in the practice of scanning electron microscopy (SEM). It covers both general and specific concepts, classified according to their hierarchy in a systematic order, with those terms that have already been defined in ISO 23833 also included, where appropriate.

This International Standard is applicable to all standardization documents relevant to the practice of SEM. In addition, some clauses of this International Standard are applicable to documents relevant to related fields (e.g. EPMA, AEM, EDS) for the definition of terms which are relevant to such fields.