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immediate downloadReleased: 2021-05-07
BS ISO 23216:2021
Carbon based films. Determination of optical properties of amorphous carbon films by spectroscopic ellipsometry
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| Standard number: | BS ISO 23216:2021 |
| Pages: | 16 |
| Released: | 2021-05-07 |
| ISBN: | 978 0 539 05871 0 |
| Status: | Standard |
DESCRIPTION
BS ISO 23216:2021
This standard BS ISO 23216:2021 Carbon based films. Determination of optical properties of amorphous carbon films by spectroscopic ellipsometry is classified in these ICS categories:
- 25.220.99 Other treatments and coatings
This document specifies spectroscopic ellipsometry for the determination of optical properties (refractive index n and extinction coefficient k) and the optical classification of different types of amorphous carbon films within the n-k plane.
It is applicable to amorphous carbon films deposited by ionized evaporation, sputtering, arc deposition, plasma-assisted chemical vapour deposition, hot filament techniques and others.
It does not apply to carbon films modified with metals or silicon, amorphous carbon films that have a gradient of composition/property in the thickness, paints and varnishes.