BS ISO 29301:2017

This standard BS ISO 29301:2017 Microbeam analysis. Analytical electron microscopy. Methods for calibrating image magnification by using reference materials with periodic structures is classified in these ICS categories:

• 37.020 Optical equipment
• 71.040.50 Physicochemical methods of analysis

This document specifies a calibration procedure applicable to images recorded over a wide magnification range in a transmission electron microscope (TEM). The reference materials used for calibration possess a periodic structure, such as a diffraction grating replica, a super-lattice structure of semiconductor or an analysing crystal for X-ray analysis, and a crystal lattice image of carbon, gold or silicon. This document is applicable to the magnification of the TEM image recorded on a photographic film, or an imaging plate, or detected by an image sensor built into a digital camera. This document also refers to the calibration of a scale bar. This document does not apply to the dedicated critical dimension measurement TEM (CD-TEM) and the scanning transmission electron microscope (STEM).