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Main page>CSN EN ISO 23216 - Carbon based films - Determination of optical properties of amorphous carbon films by spectroscopic ellipsometry
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Released: 01.04.2023
CSN EN ISO 23216 - Carbon based films - Determination of optical properties of amorphous carbon films by spectroscopic ellipsometry

CSN EN ISO 23216

Carbon based films - Determination of optical properties of amorphous carbon films by spectroscopic ellipsometry

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Number of Standard:CSN EN ISO 23216
Category:039051
Pages:20
Released:01.04.2023
Catalog number:516601
DESCRIPTION

CSN EN ISO 23216

CSN EN ISO 23216 This document specifies spectroscopic ellipsometry for the determination of optical properties (refractive index n and extinction coefficient k) and the optical classification of different types of amorphous carbon films within the n-k plane. It is applicable to amorphous carbon films deposited by ionized evaporation, sputtering, arc deposition, plasma-assisted chemical vapour deposition, hot filament techniques and others. It does not apply to carbon films modified with metals or silicon, amorphous carbon films that have a gradient of composition/property in the thickness, paints and varnishes.
Original English text of CSN EN Standard.
The price of the Standard included all amendments and correcturs.