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Homepage>IEC Standards>IEC 62047-32:2019 - Semiconductor devices - Micro-electromechanical devices - Part 32: Test method for the nonlinear vibration of MEMS resonators
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download between 0-24 hoursReleased: 2019-01-24
IEC 62047-32:2019 - Semiconductor devices - Micro-electromechanical devices - Part 32: Test method for the nonlinear vibration of MEMS resonators

IEC 62047-32:2019

Semiconductor devices - Micro-electromechanical devices - Part 32: Test method for the nonlinear vibration of MEMS resonators

Dispositifs à semiconducteurs - Dispositifs microélectromécaniques - Partie 32: Méthode d’essai pour la vibration non linéaire des résonateurs MEMS

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English/French - Bilingual
Standard number:IEC 62047-32:2019
Released:2019-01-24
Language:English/French - Bilingual
DESCRIPTION

IEC 62047-32:2019

IEC 62047-32:2019 specifies the test method and test condition for the nonlinear vibration of MEMS resonators. The statements made in this document apply to the development and manufacture for MEMS resonators.