ISO 16794: 2003 specifies a test method for the determination of hydrocarbons, chlorocarbons and partially or completely substituted halocarbons or halohydrocarbons contained as impurities in uranium hexafluoride (UF₆) by infrared spectrometry.

This method cannot be used for compounds giving IR rays with interference by UF₆ (for example CF₄).

The test method is quantitative and applicable in the mole fraction from 0,000 1 % or 0,001 0 %, depending on the type of impurity, up to 0,100 %.

The test method can also be used for the determination of hydrofluoric acid (HF) and several elements existing as fluorides; boron in BF₃, silicon in SiF₄, phosphorus in PF₅, molybdenum in MoF₆ and tungsten in WF₆.