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immediate downloadReleased: 2026-06-01
ISO 19383:2026
ISO 19383:2026 - Atomic layer deposition — Chemical characteristics and related process specifications of atomic layer deposition precursors
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| Standard´s number: | ISO 19383:2026 |
| Edition: | 1 |
| Released: | 2026-06-01 |
| Pages (English): | 13 |
DESCRIPTION
ISO 19383:2026
This document defines the chemical characteristics and related process specifications of atomic layer deposition precursors, including assay content, metal purity and anion content specification.