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immediate downloadReleased: 2023-12-06
ISO 21360-6:2023
ISO 21360-6:2023 - Vacuum technology — Standard methods for measuring vacuum-pump performance — Part 6: Cryogenic vacuum pumps
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| Standard´s number: | ISO 21360-6:2023 |
| Edition: | 1 |
| Released: | 2023-12-06 |
| Pages (English): | 12 |
DESCRIPTION
ISO 21360-6:2023
This document specifies methods for measuring the volume flow rate, maximum throughput, pumping capacity, base pressure cryogenic vacuum pump, cooldown time and crossover value of cryogenic vacuum pumps.
It is applicable to two-stage, closed-loop gaseous helium cryogenic vacuum pumps, which can be directly flanged to a vacuum chamber.