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Homepage>ISO Standards>ISO 21859 Fine ceramics (advanced ceramics, advanced technical ceramics) - Test method for plasma resistance of ceramic components in semiconductor manufacturing equipment
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download between 0-24 hoursReleased: 2019

ISO 21859

Fine ceramics (advanced ceramics, advanced technical ceramics) - Test method for plasma resistance of ceramic components in semiconductor manufacturing equipment

CURRENCY
LANGUAGE
English
Standard´s number:ISO 21859
Pages:4
Edition:1
Released:2019
Language:English
DESCRIPTION

ISO 21859


This document specifies a test method for plasma resistance of ceramic components in semiconductor manufacturing equipment. It is applicable to ceramic components of plasma-resistant components in dry etching chambers used in semiconductor manufacturing.