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>ISO Standards>17>17.020>ISO 23131-3:2026 - Ellipsometry — Part 3: Transparent single layer model
immediate downloadReleased: 2026-01-30
ISO 23131-3:2026 - Ellipsometry — Part 3: Transparent single layer model

ISO 23131-3:2026

ISO 23131-3:2026 - Ellipsometry — Part 3: Transparent single layer model

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Standard´s number:ISO 23131-3:2026
Edition:1
Released:2026-01-30
Pages (English):29
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ISO 23131-3:2026

This document uses ellipsometric measurements and their analysis to specify the method for the determination of the layer thickness d of a transparent layer and the optical (refractive index n) or dielectric (real part ε1) constants/functions based on the transparent single layer model within a spectral region, for which k = 0 applies.