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immediate downloadReleased: 2026-08-03
ISO 25164:2026
ISO 25164:2026 - Physical vapor deposition coatings — Magnetron sputtering deposition of TiAlSiN thin films — Specification
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| Standard´s number: | ISO 25164:2026 |
| Edition: | 1 |
| Released: | 2026-08-03 |
| Pages (English): | 6 |
DESCRIPTION
ISO 25164:2026
This document specifies the technical requirements for TiAlSiN thin films deposited by magnetron sputtering.
This document is also applicable to the deposition of TiN, TiAlN or TiSiN thin films.