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immediate downloadReleased: 2021-03-26
PD IEC TR 63258:2021
Nanotechnologies. A guideline for ellipsometry application to evaluate the thickness of nanoscale films
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| Standard number: | PD IEC TR 63258:2021 |
| Pages: | 24 |
| Released: | 2021-03-26 |
| ISBN: | 978 0 539 00930 9 |
| Status: | Standard |
DESCRIPTION
PD IEC TR 63258:2021
This standard PD IEC TR 63258:2021 Nanotechnologies. A guideline for ellipsometry application to evaluate the thickness of nanoscale films is classified in these ICS categories:
- 07.120 Nanotechnologies
This document, which is a Technical Report, is focused on the practical protocol of ellipsometry to evaluate the thickness of nanoscale films. This document does not include any specification of the ellipsometers, but suggests how to minimize the data variation to improve data reproducibility.
This document includes
outlines of the ellipsometry procedures,
methods of interpretation of results and discussion of data analysis, and
case studies.