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UNE EN 62047-10:2011
Semiconductor devices - Micro-electromechanical devices - Part 10: Micro-pillar compression test for MEMS materials (Endorsed by AENOR in December of 2011.)
Dispositivos semiconductores. Dispositivos micro-electromecánicos. Parte 10: Ensayo de compresión de los micropilares en materiales MEMS. (Ratificada por AENOR en diciembre de 2011.)
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| Standard number: | UNE EN 62047-10:2011 |
| Pages: | 15 |
| Released: | 2011-12-01 |
DESCRIPTION
This standard UNE EN 62047-10:2011 Semiconductor devices - Micro-electromechanical devices - Part 10: Micro-pillar compression test for MEMS materials (Endorsed by AENOR in December of 2011.) is classified in these ICS categories:
- 31.080.99