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UNE EN 62047-12:2011
Semiconductor devices - Micro-electromechanical devices - Part 12: Bending fatigue testing method of thin film materials using resonant vibration of MEMS structures (Endorsed by AENOR in February of 2012.)
Dispositivos semiconductores. Dispositivos micro-electromecánicos. Parte 12: Método de ensayo de fatiga al doblado de materiales de película fina utilizando vibración resonante de las estructuras MEMS. (Ratificada por AENOR en febrero de 2012.)
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| Standard number: | UNE EN 62047-12:2011 |
| Pages: | 33 |
| Released: | 2012-02-01 |
DESCRIPTION
This standard UNE EN 62047-12:2011 Semiconductor devices - Micro-electromechanical devices - Part 12: Bending fatigue testing method of thin film materials using resonant vibration of MEMS structures (Endorsed by AENOR in February of 2012.) is classified in these ICS categories:
- 31.080.99