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UNE EN 62047-17:2015
Semiconductor devices - Micro-electromechanical devices - Part 17: Bulge test method for measuring mechanical properties of thin films (Endorsed by AENOR in August of 2015.)
Dispositivos semiconductores. Dispositivos microelectromecánicos. Parte 17: Método de ensayo de bulto para medir las propiedades mecánicas de las películas finas (Ratificada por AENOR en agosto de 2015.)
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| Standard number: | UNE EN 62047-17:2015 |
| Pages: | 31 |
| Released: | 2015-08-01 |
DESCRIPTION
This standard UNE EN 62047-17:2015 Semiconductor devices - Micro-electromechanical devices - Part 17: Bulge test method for measuring mechanical properties of thin films (Endorsed by AENOR in August of 2015.) is classified in these ICS categories:
- 31.080.99