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UNE EN 62047-21:2014
Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson's ratio of thin film MEMS materials (Endorsed by AENOR in November of 2014.)
Dispositivos semiconductores. Dispositivos micro-electromecánicos. Parte 21: Método de ensayo para la relación de Poisson de materiales MEMS de película delgada (Ratificada por AENOR en noviembre de 2014.)
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| Standard number: | UNE EN 62047-21:2014 |
| Pages: | 17 |
| Released: | 2014-11-01 |
DESCRIPTION
This standard UNE EN 62047-21:2014 Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson's ratio of thin film MEMS materials (Endorsed by AENOR in November of 2014.) is classified in these ICS categories:
- 31.080.99