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UNE EN 62047-26:2016
Semiconductor devices - Micro-electromechanical devices - Part 26: Description and measurement methods for micro trench and needle structures (Endorsed by AENOR in June of 2016.)
Dispositivos semiconductores. Dispositivos microelectromecánicos. Parte 26: Descripción y métodos de medición para microsurcos y estructuras de agujas (Ratificada por AENOR en junio de 2016.)
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| Standard number: | UNE EN 62047-26:2016 |
| Pages: | 35 |
| Released: | 2016-06-01 |
DESCRIPTION
This standard UNE EN 62047-26:2016 Semiconductor devices - Micro-electromechanical devices - Part 26: Description and measurement methods for micro trench and needle structures (Endorsed by AENOR in June of 2016.) is classified in these ICS categories:
- 31.080.99