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>UNE standards>UNE EN 62047-4:2010 Semiconductor devices - Micro-electromechanical devices -- Part 4: Generic specification for MEMS (Endorsed by AENOR in February of 2011.)
in stockReleased: 2011-02-01
UNE EN 62047-4:2010 Semiconductor devices - Micro-electromechanical devices -- Part 4: Generic specification for MEMS (Endorsed by AENOR in February of 2011.)

UNE EN 62047-4:2010

Semiconductor devices - Micro-electromechanical devices -- Part 4: Generic specification for MEMS (Endorsed by AENOR in February of 2011.)

Dispositivos semiconductores. Dispositivos micro-electromecánicos. Parte 4: Especificaciones generales para MEMS. (Ratificada por AENOR en febrero de 2011.)

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Standard number:UNE EN 62047-4:2010
Pages:23
Released:2011-02-01
Status:Standard
DESCRIPTION

This standard UNE EN 62047-4:2010 Semiconductor devices - Micro-electromechanical devices -- Part 4: Generic specification for MEMS (Endorsed by AENOR in February of 2011.) is classified in these ICS categories:

  • 31.080.99
Categories:
UNE standards
31.080.99 Other semiconductor devices
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