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UNE EN 62047-4:2010
Semiconductor devices - Micro-electromechanical devices -- Part 4: Generic specification for MEMS (Endorsed by AENOR in February of 2011.)
Dispositivos semiconductores. Dispositivos micro-electromecánicos. Parte 4: Especificaciones generales para MEMS. (Ratificada por AENOR en febrero de 2011.)
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| Standard number: | UNE EN 62047-4:2010 |
| Pages: | 23 |
| Released: | 2011-02-01 |
DESCRIPTION
This standard UNE EN 62047-4:2010 Semiconductor devices - Micro-electromechanical devices -- Part 4: Generic specification for MEMS (Endorsed by AENOR in February of 2011.) is classified in these ICS categories:
- 31.080.99