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UNE EN 62047-3:2006
Semiconductor devices - Micro-electromechanical devices -- Part 3: Thin film standard test piece for tensile testing (IEC 62047-3:2006) (Endorsed by AENOR in January of 2007.)
Dispositivos semiconductores. Parte 3: Dispositivos micro-electromecánicos. Pieza de ensayo patrón de película fina para ensayo de tensión (IEC 62047-3:2006) (Ratificada por AENOR en enero de 2007.)
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Standard number: | UNE EN 62047-3:2006 |
Pages: | 12 |
Released: | 2007-01-01 |
DESCRIPTION
This standard UNE EN 62047-3:2006 Semiconductor devices - Micro-electromechanical devices -- Part 3: Thin film standard test piece for tensile testing (IEC 62047-3:2006) (Endorsed by AENOR in January of 2007.) is classified in these ICS categories:
- 31.080.99