PRICES include / exclude VAT
in stockReleased: 2013-11-01
UNE EN 62047-11:2013
Semiconductor devices - Micro-electromechanical devices - Part 11: Test method for coefficients of linear thermal expansion of free-standing materials for micro-electromechanical systems (Endorsed by AENOR in November of 2013.)
Dispositivos semiconductores. Dispositivos microelectromecánicos. Parte 11: Método de ensayo para coeficientes de expansión térmica lineales de materiales MEMS independientes (Ratificada por AENOR en noviembre de 2013.)
Format
Availability
Price and currency
English PDF
Immediate download
79.44 USD
English Hardcopy
In stock
79.44 USD
| Standard number: | UNE EN 62047-11:2013 |
| Pages: | 23 |
| Released: | 2013-11-01 |
DESCRIPTION
This standard UNE EN 62047-11:2013 Semiconductor devices - Micro-electromechanical devices - Part 11: Test method for coefficients of linear thermal expansion of free-standing materials for micro-electromechanical systems (Endorsed by AENOR in November of 2013.) is classified in these ICS categories:
- 31.080.99